2022 PST Awardees

2022 The Best Paper Award

Atsunori Nakamoto, Shinji Yamakawa, Tetsuo Harada, and Takeo Watanabe
(University of Hyogo)

Journal of Photopolymer Science and Technology, 35, (2022) 61-65
“Grazing-Incidence Soft-X-ray Scattering for the Chemical Structure Size Distribution Analysis in EUV Resist”.